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M. Sugawara
Plasma Etching
Plasma Etching
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$487.00 AUD
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$487.00 AUD
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Printed after you order and usually delivered within 2–4 weeks. Once printing has commenced, your order may not be cancelled.
The focus of this book is the remarkable advances in understanding of low pressure RF (radio frequency) glow discharges. A basic analytical theory and plasma physics are explained. Plasma diagnostics are also covered before the practicalities of etcher use are explored.
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